| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that, as for the conventional PVD (Physical Vapor Deposition) treatment system, in the case the object to be treated has ruggedness having a tooth form like a gear, it is difficult to form a sufficient hard film on a dedendum part while suppressing softening caused by the heating of the object to be treated. SOLUTION: The PVD treatment system where a hard film is formed on a gear W as the object to be treated in a chamber 1 under a pressure-reduced atmosphere is provided with: a rotary shaft 2 holding the gear W; a rotary phase detecting means 7 detecting the rotary phase of the rotary shaft 2; and a controlling means 8 controlling the intensity of ions applied from ion sources 3 and 4 based on the rotary phase, and a hard film excellent in adhesion is formed on the whole of the rugged parts in the gear W. COPYRIGHT: (C)2005,JPO&NCIPI
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