| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mobile apparatus at a low cost usable even in the vacuum, controlling a first/second part moved high accurately relating to each other, positioning a mask holder relating to a projected beam in a lithograph projector, and in a manner of positioning a wafer table relating to the projected beam. <P>SOLUTION: The mobile apparatus includes three-phase coil devices 1, 2, 3 of a first part, and a platen 7 of a second part. An AC current is supplied by a current supply 8 to the first/second coil devices 1, 2, 3. The platen 7 is arranged in a region where an induction field is generated when the current is supplied to the coil device. The coil device and the platen are arranged in such a manner that a magnetic field, generated in the platen when the current is allowed to flow in a coil, causes movement toward a first/second direction between the platen and the coil. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
