PHOTOSENSOR SUBSTRATE, ITS MANUFACTURING METHOD, PHOTOELECTRONIC TRANSDUCER, AND PHOTOSENSOR

摘要

PROBLEM TO BE SOLVED: To contribute to enhancement in the performance of a photosensor substrate reducing manufacture costs of the photosensor substrate, enhancing productivity and expanding the range of material selection relating to heat resistance of a base material by providing techniques for imparting conductivity by crystallizing a membrane of a metal oxide at a low temperature of 200°C or lower. SOLUTION: In the photosensor substrate with a transparent photo-sensitive layer formed on the base material, a metal oxide which is mainly composed of oxidized titanium or the like resulting from doping niobium is made into a crystalline membrane with which a base layer is formed between the base material and the photo-sensitive layer, and the photo-sensitive layer is formed as a crystalline membrane having a portion of the base layer, in contact with the photo-sensitive layer, mainly composed of at least selected one of either a zirconium oxide or a derivative of said oxide. COPYRIGHT: (C)2005,JPO&NCIPI