| 摘要 |
PROBLEM TO BE SOLVED: To reduce the period required for only reading the alignment mark of a recording medium or for conveying a recording medium, and hereby reduce the time for processing from loading a stage member with the recording medium until completion of exposure. SOLUTION: In a laser exposure apparatus 100, CCD cameras 136, 138 supported to oppose to one of loading faces 130, 132 of the stage member read the alignment mark 198 of a substrate material mounted on one of the loading faces 130, 132 of the stage member 114 when the stage member 114 is moved in the scanning direction, while a laser scanner 144 supported to oppose to the other one of the loading faces 130, 132 of the stage member 114 exposes the drawing region in the substrate material mounted on the other one of the loading faces 130, 132 of the stage member 114 with a laser beam modulated on the basis of the image information to form an image when the stage member is moved in the scanning direction. COPYRIGHT: (C)2005,JPO&NCIPI
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