| 摘要 |
PROBLEM TO BE SOLVED: To accurately keep parallel between a stamp and an ink pad and between the stamp and a base material in a pattern forming apparatus which uses the stamp. SOLUTION: A stage 10 for fixing the base material 20 is placed on a spherical seat 50 and enabled to move up and down with a moving apparatus 60. Besides, a stage 11 for fixing the ink pad 30 is placed on a spherical seat 51 and enabled to up and down move with a moving apparatus 61. By this structure, when the stamp 40 is pushed onto the ink pad 30, the spherical seat 50 moves, and the stamp becomes parallel to the ink pad 30 to fix the spherical seat 50. In the same way, when the stamp 40 is pushed onto the base material 20, the spherical seat 51 moves, and the stamp 40 becomes parallel to the base material 20 to fix the spherical seat 51 at that time. COPYRIGHT: (C)2005,JPO&NCIPI
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