| 摘要 |
<p>A quartz type pressure sensor which can eliminate, by using quartz as the detection piece of a pressure sensor, such defects of a pressure sensor using a silicon detection piece, as the difficulty of controlling the thickness of a diaphragm due to a low etching accuracy and a resultant lower detection accuracy, and a poor repeatability in elastic deformation. The pressure sensor comprises a bottom plate consisting of an insulation material, a lower electrode film and a dielectric film sequentially layered on the surface of the bottom plate, a detection piece provided with a thin-wall portion in a position facing the dielectric film and fixed to the surface of the bottom plate, an upper electrode film formed on at least part of the thin-wall portion and in a positional relation of facing the lower electrode film, and a fine-gap airtight space between the lower surface of the detection piece and the dielectric film, characterized in that the detection piece consists of a quartz material.</p> |
