| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device of exposing an optical master disk which is used in order to form, by exposure to light, a groove whose width is relatively wider than a spot diameter and whose angles of wall faces are steep, and to provide its method. <P>SOLUTION: The exposure device of an optical master disk 1 draws, with a plurality of laser beams 8, a pattern on the resist film of the surface of the pertinent master disk along a track by irradiating the surface of the master disk which is rotated at a prescribed speed. The exposure device is constituted of: an acoustooptic optical deflector 4 which is arranged in the optical path of a laser beam; a plurality of radio-frequency (RF) generating means 6, 7; and a combining means 5 which combines signals from the plurality of the RF generating means 6, 7 and supplies the resultant signal to the acoustooptic optical deflector 4. When the beam spot diameter and the deflection distance on the master disk are defined respectively as d and l, the deflection direction θ (when a track direction is defined as 0°) of the deflector 4 is arranged to be within ¾sin<SP>-1</SP>(d/1)¾ ≤θ≤45° to the advancing direction of the beam. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
