发明名称 NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, SEMICONDUCTOR DEVICE AND DISPLAY ELEMENT, AS WELL AS METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND DISPLAY ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a negative photosensitive resin composition which is high sensitivity to permit aqueous alkaline solution development and does not foam despite of curing and a semiconductor device or display element using the same and a method for manufacturing the semiconductor device or the display element. <P>SOLUTION: The negative type photosensitive resin composition contains an alkali-soluble resin (A), a photo-acid initiator (B) and a compound having a methylol group (C), in which the alkali-soluble resin (A) is preferably a polyamide resin containing the structure expressed by a specific formula and the compound having the methylol group (C) is a compound having &ge;2 methylol groups. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005010764(A) 申请公布日期 2005.01.13
申请号 JP20040151510 申请日期 2004.05.21
申请人 SUMITOMO BAKELITE CO LTD 发明人 EBARA KAZUYA;SHIBASAKI YUJI;UEDA MITSURU;BANBA TOSHIO
分类号 G03F7/038;G03F7/037;H01L21/027 主分类号 G03F7/038
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