发明名称 |
NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, SEMICONDUCTOR DEVICE AND DISPLAY ELEMENT, AS WELL AS METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND DISPLAY ELEMENT |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a negative photosensitive resin composition which is high sensitivity to permit aqueous alkaline solution development and does not foam despite of curing and a semiconductor device or display element using the same and a method for manufacturing the semiconductor device or the display element. <P>SOLUTION: The negative type photosensitive resin composition contains an alkali-soluble resin (A), a photo-acid initiator (B) and a compound having a methylol group (C), in which the alkali-soluble resin (A) is preferably a polyamide resin containing the structure expressed by a specific formula and the compound having the methylol group (C) is a compound having ≥2 methylol groups. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2005010764(A) |
申请公布日期 |
2005.01.13 |
申请号 |
JP20040151510 |
申请日期 |
2004.05.21 |
申请人 |
SUMITOMO BAKELITE CO LTD |
发明人 |
EBARA KAZUYA;SHIBASAKI YUJI;UEDA MITSURU;BANBA TOSHIO |
分类号 |
G03F7/038;G03F7/037;H01L21/027 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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