| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical element using a substrate which is minimal in the shape change due to the internal stresses of films and is not symmetrical with respect to the front and the rear. SOLUTION: The distortion of the substrate is corrected by laminating the thin films having the suitable stresses and film unevenness. COPYRIGHT: (C)2005,JPO&NCIPI
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