摘要 |
PROBLEM TO BE SOLVED: To solve the problem that in a magnetoresistive effect thin film magnetic head having a magnetoresistive effect film which is used by making a sensing current flow through the multilayered structure in a perpendicular direction, the head is easy to be affected by ion milling and also when a shield film is static charged by the trouble of a machine etc. its characteristics are easy deteriorate. SOLUTION: The influence of electrification resulting from an ion milling system is avoided by reducing the ion milling processes after formation of the magnetoresistive effect thin film magnetic head as much as possible. Specifically, an electromagnetic induction thin film magnetic head is first formed on a substrate, the magnetoresistive effect thin film magnetic head is formed after that. At this time, a head having structure in which a coil is embedded at the same horizontal position as that of a lower magnetic pole is used as the electromagnetic induction thin film magnetic head. COPYRIGHT: (C)2005,JPO&NCIPI
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