发明名称 CHROMIUM BASED NITRIDE FILM DEPOSITION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a method for depositing on a base material a chromium nitride film capable of enhancing heat resistance and durability when used for a hot-working die or the like. SOLUTION: In the method for depositing a chromium-based nitride film on a required portion of a base material in a functional metal member, a target is formed of chromium-based alloy having a substantial composition consisting of, by mass, about 2-20% Al, about 0.05-15% W and the balance W, and the chromium nitride film is formed by the reactive ion plating. The film is used mainly for a metal plastic working die. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005008920(A) 申请公布日期 2005.01.13
申请号 JP20030172390 申请日期 2003.06.17
申请人 YUKEN INDUSTRY CO LTD 发明人 SHINODA MINORU;WATABE KIYOHIKO;MASE TOMOYUKI
分类号 C23C14/06;C23C14/32;(IPC1-7):C23C14/06 主分类号 C23C14/06
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