ABRASIVE PAD, MANUFACTURING METHOD THEREOF, AND GRINDING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an abrasive pad capable of precisely making a work surface flat, a manufacturing method thereof, and a grinding method thereof. SOLUTION: The abrasive pad 10 is constituted of a platy non-foam element 11 having a flat surface, and abrasive grains 12 scattered and fixed inside and on the surface of the non-foam element 11. Average surface roughness of the surface of the abrasive pad is in the range of 0.5μm to 10μm. Shore D hardness of the abrasive pad 10 is in the range of 50 to 85. During grinding, the work W does not go down inside of the abrasive pad 10, and the abrasive pad 10 is prevented from being pulled by the work W and greatly deforming. On the surface of the abrasive pad 10, a groove 13 capable of taking in abrasive cuttings generated during grinding is formed. The groove 13 functions as a flow passage uniformly supplying abrasive liquid or abrasive slurry over the surface of the abrasive pad 10. COPYRIGHT: (C)2005,JPO&NCIPI