发明名称 |
High force metal plated spring structure |
摘要 |
Lithographically defined and etched spring structures are produced by various methods such that they avoid the formation of a plated metal wedge on an underside of the spring structure after release. A post is utilized to offset the spring from an underlying substrate by a distance greater than the thickness of the plated metal. A trench is etched into the substrate below the spring to provide clearance during deflection of the spring. Another spring includes a knee (bend) that provides the necessary clearance during deflection. A plating process is limited to the upper side of another spring. A released spring is used as a shadow mask for patterning resist that prevents wedge formation during plating. Various tip arrangements are disclosed that can be utilized with each spring structure
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申请公布号 |
US2005006829(A1) |
申请公布日期 |
2005.01.13 |
申请号 |
US20030615653 |
申请日期 |
2003.07.08 |
申请人 |
XEROX CORPORATION |
发明人 |
CHOW EUGENE M.;FORK DAVID K.;HANTSCHEL THOMAS;VAN SCHUYLENBERGH KOENRAAD F.;CHUA CHRISTOPHER L. |
分类号 |
F16F1/02;(IPC1-7):H01L27/148;F16F1/00;F16F9/00;H01L29/768 |
主分类号 |
F16F1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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