TRANSFER DEVICE, THIN PLATE-LIKE ARTICLE TRANSFER METHOD, AND THIN PLATE-LIKE ARTICLE PRODUCTION SYSTEM

摘要

The invention relates to a transfer device for transferring thin plate-like articles, such as liquid crystal display panels and glass substrates, into a processing device. The invention provides, in a transfer device provided with a relatively large robot (14) having a turning arm (16) for transferring large-sized thin plate-like articles, a transfer device capable of stabilized lifting even if the height is 2 m or so and capable of transfer in which the amount of deflection with the turning arm (16) extended can be corrected; and a thin plate-like article transferring system. A transfer robot (14) having the turning arm (16) is mounted on a horizontal support block (13) cantilevered for lifting and lowering motion on two upright support bodies (12). Further, the amount of deflection with the arm extended is corrected by raising the level of the horizontal support block (13) according to the amount of deflection. The amount of deflection can also be corrected by changing the angle of installation at which the robot (14) is mounted on the horizontal support block (13).