| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a spacer body structure capable of uniformly manufacturing the heights of a plurality of spacers with a simple method, and to provide a manufacturing apparatus for the same. SOLUTION: A processing apparatus 70 has a vacuum vessel 74 arranged in a heating furnace 72. The spacer structure 22 with spacers 30a, 30b hardened to the extent of being elastically deformable are arranged, while superpositioning with two height-regulating plates76a, 76b in the vacuum vessel 74. Then, the top ends of the spacers 30a, 30b are pressed against pressing surfaces 52a, 54a by evacuating the vacuum vessel 74 to press against an assembly 80 with first and second main walls 52, 54. Thereby, the spacers 30a, 30b are elastically deformed and the heights are made uniform, and under the condition, the spacers 30a, 30b are hardened to a desired hardness level by heating with a heating furnace 72. COPYRIGHT: (C)2005,JPO&NCIPI
|
