SILICON NITRIDE CERAMIC HAVING RARE EARTH ALUMINATE-BASED HIGH TEMPERATURE CORROSION RESISTANT LAYER

摘要

PROBLEM TO BE SOLVED: To provide a silicon nitride ceramic having a high temperature corrosion resistant coating film and its manufacturing method. SOLUTION: The silicon nitride ceramic having a corrosion resistant layer comprising a multiple oxide of a rare earth oxide and alumina and their multi-phase composition has a high temperature corrosion resistant layer having a composition between Ln4Al2O9and Ln3Al5O12(Ln expresses a rare earth) in which the atomic ratio Ln:Al is 1:(0.5-5/3). The silicon nitride ceramic is manufactured by film-forming a dense rare earth aluminate layer having 0.1-10μm film thickness on a base material by a vapor phase method or a liquid phase method and further forming the corrosion resistant layer having 0-200μm film thickness and comprising a rare earth aluminate having the composition between Ln4Al2O9and Ln3Al5O12(Ln expresses rare earth) and their multi-phase composition. COPYRIGHT: (C)2005,JPO&NCIPI