发明名称 Method of fabricating liquid crystal display device and wiring structure of liquid crystal display device
摘要 A method of fabricating a liquid crystal display device is provided. An aluminum alloy layer and a copper metal layer are sequentially formed on a substrate. A photoresist pattern is formed on the copper metal layer and the copper metal layer and the underlying aluminum alloy layer are etched to form a gate line. A gate insulating layer, an amorphous silicon layer and an impurity-doped amorphous silicon layer are deposited and then etched to form a semiconductor layer. An aluminum alloy layer and a copper metal layer are sequentially formed and etched on the structure to form a data line, a source electrode and a drain electrode. A passivation layer is formed and a contact hole and a pad opening are formed in the passivation layer. A transparent conductive thin film is deposited on this structure.
申请公布号 US2005007511(A1) 申请公布日期 2005.01.13
申请号 US20040870212 申请日期 2004.06.17
申请人 发明人 KIM JIN YOUNG
分类号 G02F1/1362;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/45;H01L29/49;H01L29/786;(IPC1-7):G02F1/136 主分类号 G02F1/1362
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