APPARATUS FOR TESTING SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide an apparatus capable of arranging a plurality of device measuring apparatuses made of BOST (Built-Off Self-Test) boards etc. in the vicinity of a device to be measured and highly accurately testing a large number of circuits mixed onto a semiconductor integrated circuit. SOLUTION: The apparatus is provided with both the BOST board 1 constituted of both a measuring part 5 and an analytical part 6 and a control/communication card 3 connected to the BOST board 1 for controlling the BOST board 1 and communicating with a general-purpose computer device 2. By this constitution, it is possible to reduce costs in comparison with an expensive test apparatus provided by a test maker. COPYRIGHT: (C)2005,JPO&NCIPI