APPARATUS FOR COLLECTING SCRAPS TO AUTOMATICALLY EMPTY SCRAPS FILLED IN SCRAP COLLECTING APPARATUS DURING SEMICONDUCTOR FABRICATING PROCESS

摘要

PURPOSE: An apparatus for collecting scraps is provided to automatically empty the scraps filled in a scrap collecting apparatus during a semiconductor fabricating process by opening/shutting the cover of the bottom surface of a body of the scrap collecting apparatus by an open-and-shut movement unit and by including a sensor to open/shut the cover automatically. CONSTITUTION: A box-type body(21) is prepared whose lower part is open. An inducing pipe(26) for inducing scraps is formed in the upper part of the box-type body. The inside of the box-type body is sealed to pile up the scraps, The inside of the box-type body is opened by a bottom surface cover(23) of the box-type body to make the piled scraps fall free. An open-and-shut movement unit performs an open-and-shut operation on the bottom surface cover with respect to the box-type body, coupled to the bottom surface cover.