发明名称 ANTI-STRATIFICATION-SOLUTION DELIVERY SYSTEM FOR SPIN-ON DIELECTRICS
摘要 An anti-stratification-delivery system comprises a multi-zone-refrigeration unit having at least first and second zone temperature controllers, the first and second zone temperature controllers are capable of being set at different temperatures to establish a temperature gradient in a liquid, the temperature gradient being sufficient to cause natural-thermal convention within the liquid to stir a colloid suspended in the liquid to an approximately uniform-colloidal suspension; and a delivery system configured to dispense the approximately uniform-colloidal suspension.
申请公布号 US2005005629(A1) 申请公布日期 2005.01.13
申请号 US20030617902 申请日期 2003.07.10
申请人 发明人 ZHAO JUN;ROBERTS RICK J.
分类号 B01F5/10;B01F13/00;B01F15/06;B24B37/04;B24B57/02;B67D7/76;B67D7/80;H01L21/312;H01L21/316;H01L21/44;(IPC1-7):B67D5/62;B67D5/58 主分类号 B01F5/10
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