| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus for acquiring an image in a range exceeding the visual field of an imaging section. <P>SOLUTION: The inspection apparatus 1 is provided with the imaging section 10 that moves relative with respect to an object to be inspected and images the object to be inspected; and a control section 20 for acquiring the captured image of the imaging section by controlling the drive of the imaging section. The control section 20 has an image processing section 30 for performing image processing on a plurality of images acquired by the imaging section 10. The image processing section 30 has an image compositing section 31 for producing a composited image, by laminating a plurality of acquired images. The inspection apparatus 1 inspects the object to be inspected by using the composited image. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
