| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for diagnosing the deterioration of a metal film, capable of precisely forecasting the deterioration of the metal film on which a passivated film is formed like a tin alloy film, and to provide a deterioration diagnosis system therefor. SOLUTION: A test object, having a film to be diagnosed formed thereon, is subjected to a deterioration accelerating test, for example, an atmosphere exposing test under predetermined conditions by the deterioration-diagnosing system S for the metal film equipped with a deterioration accelerating test device 10, an electron microscope 20, a composition analyzer 30 and a lifetime estimation device 40. Then, the electron microscopic image of the cross section of the test object, after the deterioration accelerating test has been obtained to form an element map of the cross section of the test object, based on the electron microscopic image and the film thickness of the deteriorated element layer due to a deteriorated element layer in the element map is measured, while the remaining film thickness of a target film is measured. The deterioration time function of the target film is formed, on the basis of the film thickness of the deteriorated element layer, and the initial film thickness and remaining film thickness of the target film and the remaining lifetime is calculated, based on the deterioration time function. COPYRIGHT: (C)2005,JPO&NCIPI
|
