| 摘要 |
PROBLEM TO BE SOLVED: To provide a preparation process and preparation apparatus for a conductive polymer which enables a solid electrolytic capacitor to have a compatibility between a low ESR and a high capacitance, a low loss and a low leakage current. SOLUTION: This preparation process of the conductive polymer is a chemical polymerization process, in which a conductive polymer is obtained by reacting at least a monomer and an oxidizing agent, and the reaction between a monomer and an oxidizing agent is carried out in a polymerization vessel having at least an oversaturated water vapor atmosphere. By this method, a flat conductive polymer (10) is obtained. By this method, which roughly equalizes respectively the polymerization rate and the density on a substrate side and those on the other side, a gas phase side, a low-resistance conductive polymer film having a good adhesiveness to a substrate, especially glass and ceramics, is provided. Also provided are its preparation process and a conductive polymer which is not easily peeled off from a substrate because the conductive polymer film is less warped and flat. COPYRIGHT: (C)2005,JPO&NCIPI
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