| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary table device capable of precisely rotating a table main body without requiring a motor with large driving force, and reducing wear at an engaging part in a speed-reducing mechanism. SOLUTION: The table main body 14 is rotatably supported on a frame 11 through a hydrostatic bearing 16. Between the table main body 14 and the motor 17 for rotating the table main body 14, the speed-reducing mechanism 24 having rotating axes in a driving side and a driven side that are parallel with an axis of the table main body 14 are interposed. As the speed-reducing mechanism 24, a wave motion gear speed-reducing mechanism 25 and a spur gear speed-reducing mechanism 26 are equipped. COPYRIGHT: (C)2005,JPO&NCIPI
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