PULSED ION BEAM CONTROL OF SOLID STATE FEATURES,申请号AU20030304247-传众专利搜索

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发明名称	PULSED ION BEAM CONTROL OF SOLID STATE FEATURES
摘要
申请公布号	AU2003304247(A1)	申请公布日期	2005.01.13
申请号	AU20030304247	申请日期	2003.10.28
申请人	PRESIDENT AND FELLOWS OF HARVARD COLLEGE	发明人	JENE, A. GOLOVCHENKO;DEREK, M. STEIN;JIALI LI
分类号	B81B1/00;B81C99/00;(IPC1-7):B81B1/00;B81C5/00;H01L21/66	主分类号	B81B1/00
代理机构		代理人
主权项
地址

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