| 摘要 |
PROBLEM TO BE SOLVED: To effectively suppress the deformation of a mirror substrate when oscillated in a beam support type oscillating mirror which is electrostatically driven. SOLUTION: In the oscillating mirror having a dual stage electrode structure provided with first driving electrodes 208 and 209 and second driving electrodes 223 and 224, an insulation film 202 is formed on the back face of the mirror substrate 201 and a rib 250 for reinforcement is formed on the insulation film 202. The deformation of the mirror substrate 201 at oscillation is suppressed by the rib 250. The rib is easily and accurately machined with etching. When the second driving electrode and the rib are simultaneously formed with an etching of silicon, the deviation of etching area is smaller than the case where no rib exists, thus, the machining accuracy and the machining yield are improved. COPYRIGHT: (C)2005,JPO&NCIPI
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