发明名称 Solution-processed thin film transistor formation method
摘要 An exemplary solution-processed thin film transistor formation method of the invention forms conductive solution-processed thin film material contacts, semiconductor solution-processed thin film material active regions, and dielectric solution-processed thin film material isolations in a sequence and organization to form a solution-processed thin film structure capable of transistor operation. During or after the formation of the transistor structure, laser ablation is applied to one or more of the conductive solution-processed thin film material contacts, the semiconductor solution-processed thin film material active regions and the dielectric solution-processed thin film material isolations to pattern or complete patterning of a material being selectively ablated.
申请公布号 US2005009248(A1) 申请公布日期 2005.01.13
申请号 US20030617114 申请日期 2003.07.09
申请人 WENG JIAN-GANG;PRASAD RAVI;ADDINGTON CARY G.;CHEUNG MAN HO 发明人 WENG JIAN-GANG;PRASAD RAVI;ADDINGTON CARY G.;CHEUNG MAN HO
分类号 H01L21/336;H01L51/00;H01L51/05;H01L51/30;H01L51/40;(IPC1-7):H01L21/84;H01L21/76;H01L21/00 主分类号 H01L21/336
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