| 发明名称 |
ELECTROSTATIC CHUCK FOR SUBSTRATE STAGE, ELECTRODE USED FOR THE CHUCK, AND TREATING SYSTEM HAVING THE CHUCK AND THE ELECTRODE |
| 摘要 |
<p>An electrostatic chuck for a substrate stage, wherein highly pure ceramics is thermally sprayed on the surfaces of bar-like base materials to form a single layer thermally sprayed film so as to form electrodes. The plurality of electrodes are arranged at specified intervals.</p> |
| 申请公布号 |
WO2005004229(A1) |
申请公布日期 |
2005.01.13 |
| 申请号 |
WO2004JP09346 |
申请日期 |
2004.06.25 |
| 申请人 |
FUTURE VISION INC.;KOBAYASHI, TOSHIKI;IWABUCHI, KATSUHIKO |
发明人 |
KOBAYASHI, TOSHIKI;IWABUCHI, KATSUHIKO |
| 分类号 |
H01L21/683;H01L21/68;H02N13/00;(IPC1-7):H01L21/68;H01L21/306 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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