发明名称 |
Photosensitive resin precursor composition |
摘要 |
<p>The present invention relates to a positive photosensitive resin precursor composition which exhibits good storage stability after exposure. A photosensitive resin precursor composition comprises (a) a polymer essentially composed of a structural unit expressed by formula (1); (b) at least two photo acid generators; and (c) a compound having an alkoxymethyl group:
wherein R 1 represents an organic group with a valence of 2 to 8, having at least two carbon atoms; R 2 represents an organic group with a valence of 2 to 6, having at least two carbon atoms; R 3 represents hydrogen or an organic group having a carbon number in the range of 1 to 20; n represents a number ranging from 10 to 100,000; m represents an integer in the range of 0 to 2; and p and q represent integers in the range of 0 to 4 and satisfy p + q > 0.</p> |
申请公布号 |
EP1496395(A2) |
申请公布日期 |
2005.01.12 |
申请号 |
EP20040016008 |
申请日期 |
2004.07.07 |
申请人 |
TORAY INDUSTRIES, INC. |
发明人 |
FUJITA, YOJI;YUBA, TOMOYUKI;SUWA, MITSUHITO |
分类号 |
G03F7/022;G03F7/004;G03F7/023;G03F7/075;(IPC1-7):G03F7/023 |
主分类号 |
G03F7/022 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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