| 摘要 |
Method for production of a mechanical resonator with a planar monolithic vibrating structure machined from crystalline material. The material can be trigonal or hexagonal in structure with the material cut along the (001) plane, while if cubic it is cut along the (111) plane and a vibration mode of order 2 is used. If the material is tetragonal or hexagonal it is cut along the (001) plane. If the material is cubic and cut along (001), (100) or (010) plane vibration mode of order 3 is used. |
