COOLING PIPE HAVING HIGH SURFACE RESISTANCE FOR SUPPRESSING SURFACE CURRENT AND RADIO FREQUENCY NOISE BY FORMING UNEVEN PART ON INNER SURFACE THEREOF

摘要

PURPOSE: A cooling pipe having a high surface resistance is provided to suppress a surface current and a radio frequency noise by forming an uneven part on an inner surface thereof. CONSTITUTION: A cooling pipe(100) is used for circulating a coolant supplied from a coil part of a chamber and a cooling part of an electrostatic chuck. An uneven part(120) is formed on an inner surface of the cooling pipe. The uneven part is formed with a plurality of protrusions. The uneven part has a shape of net.