| 摘要 |
<p>A flow control valve apparatus using a flow control valve manufactured via micro-machining is provided. The flow control valve has a substrate (101) defining at least one orifice (110) through which a fluid can flow, a support member (120) formed on a first surface of the substrate, at least one flap (102) corresponding to the at least one orifice, a pair of elastic flexures (103a,103b) connecting the support member to the at least one flap, and a driving means (coil 104) for displacing the at least one flap between the first and second positions to control fluid flow through the at least one orifice. The support member (120) is formed adjacent to the at least one orifice (110) and the at least one flap (102) extends from the support member to fittingly engage the at least one orifice in a first and second position. Also, the pair of elastic flexures (103a,103b) provides an elastic restorative force proportional to a displacement of the at least one flap between the first and second positions. <IMAGE></p> |
