BAFFLE HAVING PLURAL SLITS FOR OPTIMIZING FLOW OF SOURCE GASES BY FORMING PLURAL SLITS PENETRATING BODY OF BAFFLE

摘要

PURPOSE: A baffle having plural slits for optimizing flow of source gases is provided to optimize flow of source gases by forming a plurality of slits penetrating a body of a baffle. CONSTITUTION: A baffle is coupled to a focus ring for grasping a substrate and is used for controlling a flow rate of source gas. A body part(420) includes a plurality of slits(430) and a substrate entrance hole(440). A protrusion part(470) includes a plurality of slits and is coupled vertically to the body part. The body part further includes a hole corresponding to the substrate entrance hole.