| 发明名称 |
COMPLEX MICRODEVICES AND APPPARATUS AND METHODS FOR FABRICATING SUCH DEVICES |
| 摘要 |
Various embodiments of the invention are directed to various microdevices including sensors, actuators, valves, scanning mirrors, accelerometers, switches, and the like. In some embodiments the devices are formed via electrochemical fabrication EFAB TM |
| 申请公布号 |
EP1495482(A2) |
申请公布日期 |
2005.01.12 |
| 申请号 |
EP20020786937 |
申请日期 |
2002.12.06 |
| 申请人 |
MEMGEN CORPORATION |
发明人 |
BANG, CHRISTOPHER, A.;COHEN, ADAM, L.;LOCKARD, MICHAEL, S.;EVANS, JOHN, D. |
| 分类号 |
B81B3/00;B81C1/00;G01P15/08;G01P15/125;H01P3/06;H01P5/18;H01P11/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
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