SEMICONDUCTOR FABRICATION APPARATUS FOR PHOTO-LITHOGRAPHY PROCESS FOR IMPROVING PROCESS EFFICIENCY BY PERFORMING SPREADING PROCESS AND DEVELOPING PROCESS, RESPECTIVELY

摘要

PURPOSE: A semiconductor fabrication apparatus for photo-lithography process is provided to improve the process efficiency by performing a spreading process and a developing process, respectively. CONSTITUTION: A first processing region(120) is connected to a loading/unloading port(110). A plurality of spreading modules are arranged in a lateral direction of the first processing region. A second processing region(130) is connected to the loading/unloading port. A plurality of developing modules are arranged in a lateral direction of the second processing region. A third processing region(140) has a predetermined space including the first and the second processing region. A plurality of spreading modules are arranged in a longitudinal direction of the third processing region. An exposure system(150) is connected to the third processing region through an interface port.