Process chamber,申请号EP19990810788-传众专利搜索

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发明名称	Process chamber
摘要
申请公布号	EP0989594(A3)	申请公布日期	2005.01.12
申请号	EP19990810788	申请日期	1999.09.02
申请人	LEVITRONIX LLC	发明人	SCHOEB, RETO, DR.
分类号	H01L21/00;H01L21/687;(IPC1-7):H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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