MASS-FLOW-METER ISOLATED FROM RADIO FREQUENCY NOISE FOR PREVENTING INFLUENCE OF RADIO FREQUENCY NOISE TO CONTROLLER BY SEALING CONTACT PART BETWEEN FLOATING TUBE AND COVER BY CONDUCTIVE FILM

摘要

PURPOSE: A mass-flow-meter isolated from radio frequency noise is provided to prevent an influence of radio frequency noise to a controller by sealing a contact part between a floating tube and a cover by a conductive film. CONSTITUTION: A mass-flow-meter includes a floating tube(160) having a gas flow path to control a flow rate between an electrostatic chuck and a substrate, a controller for controlling the flow path of the floating tube, and a cover(120) coupled to an upper end of the floating tube. A boundary part between the floating tube and the cover is sealed by an anti-electrostatic film(140). The anti-electrostatic film is formed with a conductive material.