Method for the rapid deposition of metallic films using a plasma of the material to be deposited,申请号GB19670033323-传众专利搜索

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发明名称	Method for the rapid deposition of metallic films using a plasma of the material to be deposited
摘要
申请公布号	GB1133397(A)	申请公布日期	1968.11.13
申请号	GB19670033323	申请日期	1967.07.20
申请人	HUGHES AIRCRAFT COMPANY	发明人	BRADY JACK DAVID;STEINHAUER ROBERT ALLEN;SLAUGHTER THEODORE SAMUEL
分类号	C23C14/32;H01J37/34	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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