| 摘要 |
PROBLEM TO BE SOLVED: To realize high precision of measurement value correction of superposition error independent of a TIS value by correcting a measurement value based on an average value of a TIS value when its dispersion is less than a reference value, by correcting it base on each TIS value when it exceeds a reference value and an extraordinary value exists and correcting it based on an average value except an extraordinary value when it exceeds a reference value and an extraordinary value does not exist. SOLUTION: When dispersion of a plurality of TIS values is less than a reference value, a measurement value of relative misregistration of each mark is corrected based on an average value of a TIS value. When dispersion of a pluralist of TIS values exceeds a reference value and a TIS value disperses largely with respect to 0, a measurement value of each relative misregistration of each mark is corrected based on each TIS value. When dispersion of a plurality of TIS values exceeds a reference value and the difference between any of a puerility of TIS values and other TIS values is large, a measurement value of relative misregistration of each of a puerility of marks is corrected based on an average value of TIS value except the TIS value of the large difference. |
