CONTAMINATION CONTROL SYSTEM AND AIR-CONDITIONING SYSTEM OF SUBSTRATE PROCESSING APPARATUS USING THE SAME FOR PREVENTING ERRORS DUE TO VARIOUS CONTAMINATION SOURCES BY IMPROVING WET TYPE AIR-CONDITIONING SYSTEM

摘要

PURPOSE: A contamination control system and an air-conditioning system of a substrate processing apparatus using the same are provided to prevent errors due to various contamination sources by improving a wet type air-conditioning system. CONSTITUTION: An injection unit(100) includes one or more nozzle to inject water. One or more remover(110) is used for trapping the water containing contaminants. A circulation unit supplies the circulation water including an additive for controlling pH to the injection unit. The additive has a function for absorbing light and generating active kinds including electrons and holes. The active kinds are used for analyzing contaminants of the circulation water.