APPARATUS FOR INSPECTING WIRING PATTERN INCLUDING ILLUMINATION DEVICE FOR IRRADIATING ILLUMINATION LIGHT TO SUBSTRATE

摘要

PURPOSE: An apparatus for inspecting a wiring pattern is provided to reduce an inspection fault and to reduce an inspection time by mixing a reflective illumination inspection with a vertical illumination inspection. CONSTITUTION: An apparatus for inspecting a wiring pattern includes an illumination device for irradiating an illumination light to a substrate. An image forming device is provided to from an illumination image of the substrate by receiving an illumination light transmitted onto the substrate. The image forming device forms a vertical illumination image of the substrate by receiving a vertical illumination light reflected from the substrate. A controlling unit(4) determines a wiring pattern of the substrate on the basis of patterns of the illumination image and the vertical illumination image of the substrate formed by using the image forming device.