发明名称 NON-POLAR (A1,B,In,Ga) QUANTUM WELL AND HETEROSTRUCTURE MATERIALS AND DEVICES
摘要 Non-polar (1120) a-plane gallium nitride (GaN) films with planar surfaces are grown on (1102) r-plane sapphire substrates by employing a low temperature nucleation layer as a buffer layer prior to a high temperature growth of the non-polar (1120) a-plane GaN thin films
申请公布号 EP1495167(A1) 申请公布日期 2005.01.12
申请号 EP20030719699 申请日期 2003.04.15
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 CRAVEN, MICHAEL, D.;KELLER, STACIA;DENBAARS, STEVEN, P.;MARGALITH, TAL;SPECK, JAMES, S.;NAKAMURA, SHUJI;MISHRA, UMESH, K.
分类号 C23C16/04;C30B25/02;C30B25/04;C30B25/10;C30B25/18;C30B29/38;C30B29/40;C30B29/60;H01L21/205;H01L33/00;H01S5/343;(IPC1-7):C30B25/02;H01L21/00;H01L21/20 主分类号 C23C16/04
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