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发明名称
COATING INSTALLATION
摘要
申请公布号
EP1495152(A2)
申请公布日期
2005.01.12
申请号
EP20030746233
申请日期
2003.04.11
申请人
APPLIED FILMS GMBH & CO. KG
发明人
GEISLER, MICHAEL;KASTNER, ALBERT;SZYSZKA, BERND;PFLUG, ANDREAS;MALKOMES, NIELS
分类号
C23C14/34;C23C14/00;C23C14/35;(IPC1-7):C23C14/00;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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