NANO-SIZED PATTERNING METHOD USING ELECTROSTATIC SPRAY DEPOSITION OF NANOPARTICLES

摘要

PURPOSE: A method for forming a nano-sized pattern on a substrate by electrostatic spray deposition of nanoparticles is provided to give high reproducibility and minimize formation of noise particles. CONSTITUTION: The patterning method of nanoparticles comprises the steps of: preparing electrically charged nanoparticles by spraying nanoparticle-dispersed solution through a spray nozzle(capillary) equipped with a voltage-applying unit of an electrostatic spray apparatus, wherein the voltage ranging from 2-20kV is applied; evaporating the solvent from sprayed particles to form charged nanoparticles; adhering highly charged nanoparticles on the stripped range of a conductive substrate forming a pattern obtained by coating the substrate surface with photoresist and photolithographing the photomask surface, wherein the stripping of a photoresist mask is optionally required in case of patterning of monovalent nanoparticles to prevent noise nanoparticles from forming in the non-stripped range.