发明名称 |
Capacitor, semiconductor device, and manufacturing method thereof |
摘要 |
A highly reliable capacitor, a semiconductor device having high operating performance and reliability, and a manufacturing method thereof are provided. A capacitor formed of a first conductive film 102, a dielectric 103 made of an insulating material, and a second conductive film 104 is characterized in that a pin hole 106 formed by chance in the dielectric 103 is filled up with an insulating material (filler) 107 made of a resin material. This can prevent short circuit between the first conductive film 102 and the second conductive film 104. The capacitor is used as a storage capacitor provided in a pixel of a semiconductor device. <IMAGE> |
申请公布号 |
EP1052701(A3) |
申请公布日期 |
2005.01.12 |
申请号 |
EP20000110377 |
申请日期 |
2000.05.15 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
MURAKAMI, SATOSHI;HIRAKATA, YOSHIHARU;FUJIMOTO, ETSUKO;YAMAZAKI, YU;YAMAZAKI, SHUNPEI |
分类号 |
G02F1/1339;G02F1/136;G02F1/1368;H01L21/02;H01L21/20;H01L21/265;H01L21/336;H01L21/77;H01L21/822;H01L27/04;H01L27/108;H01L27/13;H01L29/786 |
主分类号 |
G02F1/1339 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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