发明名称 |
Multilayer structured quartz glass crucible and method for producing the same |
摘要 |
Disclosed is a multilayer structured quartz glass crucible, for pulling up silicon single crystal, whose structure has at least three layers comprising: a translucent outer layer made of naturally occurring quartz glass and having a large number of pores, a translucent intermediate layer, made of synthetic quartz glass and having a large number of pores, and a transparent inner layer substantially free from pores and made of a synthetic quartz glass. Thermal convection within the silicon melt is suppressed by use of the quartz glass crucible, thereby preventing oscillation on the surface of the silicon melt. A method for producing the quartz glas crucible is also disclosed.
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申请公布号 |
US6841210(B2) |
申请公布日期 |
2005.01.11 |
申请号 |
US20020048677 |
申请日期 |
2002.07.11 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO., KG;SHIN-ETSU QUARTZ PRODUCTS CO. |
发明人 |
OHAMA YASUO;MATSUI HIROSHI |
分类号 |
C03B20/00;C03B19/09;C30B15/10;C30B35/00;(IPC1-7):B65D13/02;B32B17/06;C30B13/14;F27B14/10 |
主分类号 |
C03B20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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