发明名称 Etching solution for forming an embedded resistor
摘要 A resistive etching solution containing thiourea, which is particularly suitable for etching an electrically resistive material comprised of a nickel-chromium alloy. The resistive etching solution allows for fast and effective etching of a nickel-chromium alloy in cases where the ratio of (a) copper surface area to (b) nickel/chromium surface area, is relatively large, and where fine feature etching is desired.
申请公布号 US6841084(B2) 申请公布日期 2005.01.11
申请号 US20020073503 申请日期 2002.02.11
申请人 NIKKO MATERIALS USA, INC. 发明人 LILLIE DAN;WANG JIANGTAO
分类号 H05K1/16;C23F1/02;C23F1/28;C23G1/02;C23G1/06;H01C17/24;H01L21/02;H01L21/3213;H05K3/06;(IPC1-7):B44C1/22;C03C15/00;C03C25/68;C23F1/00;C23F3/00 主分类号 H05K1/16
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