发明名称 Imaging system and method for positioning a measuring tip onto a contact region of a microchip
摘要 The imaging system provides assistance during the positioning of a measuring tip as it is placed onto a contact region of a microchip, in order to measure an on-chip signal. The contact region is imaged in a magnified fashion. An insertion device is provided that is suitable for providing a display of the on-chip signal in the imaging plane.
申请公布号 US6842260(B2) 申请公布日期 2005.01.11
申请号 US20020156538 申请日期 2002.05.28
申请人 INFINEON TECHNOLOGIES AG 发明人 DIETRICH STEFAN;DOBLER MANFRED;MARX THILO;MAYER PETER
分类号 G01B11/03;G01B11/14;(IPC1-7):G01B11/14 主分类号 G01B11/03
代理机构 代理人
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