发明名称 |
Imaging system and method for positioning a measuring tip onto a contact region of a microchip |
摘要 |
The imaging system provides assistance during the positioning of a measuring tip as it is placed onto a contact region of a microchip, in order to measure an on-chip signal. The contact region is imaged in a magnified fashion. An insertion device is provided that is suitable for providing a display of the on-chip signal in the imaging plane.
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申请公布号 |
US6842260(B2) |
申请公布日期 |
2005.01.11 |
申请号 |
US20020156538 |
申请日期 |
2002.05.28 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
DIETRICH STEFAN;DOBLER MANFRED;MARX THILO;MAYER PETER |
分类号 |
G01B11/03;G01B11/14;(IPC1-7):G01B11/14 |
主分类号 |
G01B11/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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