发明名称 |
Transmission electron microscope sample preparation |
摘要 |
Sample preparation apparatus and method includes a wafer stage platform with an optical microscope and integrated pattern recognition to automatically address specific locations on the wafer sample of interest. A laser attaches to the optical microscope to mill a set pattern around the area of interest. A precision micro-manipulator engages the sample support structure, extracts the structure, and places the structure in a TEM holder or holder tip. The holder or holder tip can then be placed inside a FIB for final thinning, followed by direct transfer into the TEM.
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申请公布号 |
US6841788(B1) |
申请公布日期 |
2005.01.11 |
申请号 |
US20010920715 |
申请日期 |
2001.08.03 |
申请人 |
ASCEND INSTRUMENTS, INC.;SCIPERIO, INC. |
发明人 |
ROBINSON JOSEPH;CHURCH KENNETH H. |
分类号 |
G01N1/32;G01N23/225;G21K7/00;(IPC1-7):H01J37/31;B23K26/38 |
主分类号 |
G01N1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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