| 摘要 |
A potential difference is applied between a movable electrode disposed a facing surface of a movable member, which the facing surface confronts a substrate extended in a predetermined direction or a vibrating member supported on the substrate vibratably in the predetermined direction, and a counter electrode disposed on the substrate or the vibrating member so as to confront the movable electrode. The applied potential difference causes an electrostatic force to act such that an apparent friction between the vibrating member and the movable member is greater than an apparent friction between the substrate and the movable member when displacing the vibrating member in a desired direction relatively on the substrate by vibrating in the predetermined direction, and thereby the movable member is relatively moved in the desired direction on the substrate.
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